T-M Vacuum Products Super Series X SS12/24-13MCX 2015

machine equipped with

• Cryogenic System

• All-stainless- dual wall- fully water jacketed chamber with pneumatic door clamps

• Electro-pneumatically operated Heat Pack door shield assembly

• Removable Hot Zone

• Molybdenum Hearth

• 46cfm mechanical roughing & backing pump

• 6 cfm mechanical hold pump

• 250mm diffusion pump

• High-Vacuum Valve: Two position Gate Valve

• SCR power supply regulation

• 3-zone heat control with independent PID loop control

• 10 HP blower providing 4200 cfm

• Gas/water heat exchanger

• 18 vents directing quick-cool gas onto workload

• Computer based control system with fully automated operation

• Recipe storage and HMI interface (23″ touchscreen)

• Data logging and Ethernet communication

• UPS power backup

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