Keyence IM-7020 2017

MACHINE SPECIFICATIONS

• Display:

  10. 4” LCD monitor (XGA: 1024 × 768)

• Image Sensor:

  1” 6.6 mega pixel monochrome CMOS

• Receiver Lens:

  Double Telecentric Lens

• Field of view:

  200 mm × 200 mm 7.87 × 7.87" (4x R50)

• High-precision measurement mode:

  125 × 125 mm 4.92" × 4.92"

• Minimum Display Unit:

  0.1 µm

• High-precision measurement mode:

  ±0.5 µm

• Wide-field measurement mode:

  ±1 µm (W/o stage movement)

• Wide-field measurement mode:

  ±2 µm (With Stage Movement)

• High-precision measurement mode:

  ±1.5 µm

• Measurement accuracy (±2?): W/o binding:

  ±5 µm *1 Wide-field measurement mode)

• W/o binding: Wide-field measurement mode:

  ±5 µm *1

• High-precision measurement mode:

  ±2 µm*2

• Wide-field measurement mode With binding :

  ± (7+0.02 L) µm*3

• High-precision measurement mode:

  ± (4+0.02L) µm*4

• Light probe Measurement Measurable area (XY):

  90 × 90 mm 3.54 × 3.54"

• Maximum Measurement Depth:

  30 mm 1.18"

• Light Probe Diameter:

  ø3 mm ø0.12"

• Measuring Force:

  0.015 N

• Repeatability:

  ±2 µm*5

• Measurement accuracy:

  ± (8+0.02 L) µm*6

• External output OK/NG/FAIL/MEAS:

  PhotoMos output

• Rated load:

  24 VDC 0.5 A

• Interface LAN:

  RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)

• USB 3.1:

  4 ports (rear: 4)

• USB 2.0 series A:

  2 ports (front: 2)

• Hard disk drive:

  500GB

• Transparent:

  Telecentric transparent illumination

• Ring:

  Four division, multi-angle illumination (electric)

• XY stage:

  100 × 100 mm 3.94 × 3.94" (electric moving)

• Withstand load:

  5 kg

• Z stage Moving Range :

  75 mm 2.95" (electric)

• Power voltage:

  100 to 240 VAC 50/60 Hz

• Power Consumption:

  430 VA or lower

• Pollution Degree:

  2

• Overvoltage Category:

  II

• Ambient Temperature:

  +10 to +35 °C 50 to 95 °F

• Relative Humidity:

  20 to 80 % RH (No condensation)