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Specifications
Equipped With
- Display 10. 4” LCD monitor (XGA: 1024 × 768)
- Image Sensor 1” 6.6 mega pixel monochrome CMOS
- Receiver Lens Double Telecentric Lens
- Field of view 200 mm × 200 mm 7.87 × 7.87" (4x R50)
- High-precision measurement mode 125 × 125 mm 4.92" × 4.92"
- Minimum Display Unit 0.1 µm
- High-precision measurement mode ±0.5 µm
- Wide-field measurement mode ±1 µm (W/o stage movement)
- Wide-field measurement mode ±2 µm (With Stage Movement)
- High-precision measurement mode ±1.5 µm
- Measurement accuracy (±2?): W/o binding ±5 µm *1 Wide-field measurement mode)
- W/o binding: Wide-field measurement mode ±5 µm *1
- High-precision measurement mode ±2 µm*2
- Wide-field measurement mode With binding ± (7+0.02 L) µm*3
- High-precision measurement mode ± (4+0.02L) µm*4
- Light probe Measurement Measurable area (XY) 90 × 90 mm 3.54 × 3.54"
- Maximum Measurement Depth 30 mm 1.18"
- Light Probe Diameter ø3 mm ø0.12"
- Measuring Force 0.015 N
- Repeatability ±2 µm*5
- Measurement accuracy ± (8+0.02 L) µm*6
- External output OK/NG/FAIL/MEAS PhotoMos output
- Rated load 24 VDC 0.5 A
- Interface LAN RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
- USB 3.1 4 ports (rear: 4)
- USB 2.0 series A 2 ports (front: 2)
- Hard disk drive 500GB
- Transparent Telecentric transparent illumination
- Ring Four division, multi-angle illumination (electric)
- XY stage 100 × 100 mm 3.94 × 3.94" (electric moving)
- Withstand load 5 kg
- Z stage Moving Range 75 mm 2.95" (electric)
- Power voltage 100 to 240 VAC 50/60 Hz
- Power Consumption 430 VA or lower
- Pollution Degree 2
- Overvoltage Category II
- Ambient Temperature +10 to +35 °C 50 to 95 °F
- Relative Humidity 20 to 80 % RH (No condensation)
Machine Description
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